semicond {faraway}

Semiconductor split-plot experiment

Description

The semicond data frame has 48 rows and 5 columns.

Format

This data frame contains the following columns:

resistance

a numeric vector

ET

a factor with levels 1 to 4 representing etch time.

Wafer

a factor with levels 1 to 3

position

a factor with levels 1 to 4

Grp

an ordered factor with levels 1/1 < 1/2 < 1/3 < 2/1 < 2/2 < 2/3 < 3/1 < 3/2 < 3/3 < 4/1 < 4/2 < 4/3

Details

Also found in the SASmixed package

Source

Littel, R. C., Milliken, G. A., Stroup, W. W., and Wolfinger, R. D. (1996), SAS System for Mixed Models, SAS Institute (Data Set 2.2(b)).