grinder_data {PH1XBAR}

Thickness measurement of silicon wafer

Description

A dataset containing the thickness measurements in nm at different positions on the silicon wafer

Usage

grinder_data

Format

A data frame with 30 rows and 5 variables:

pos1

Thickness measurement at Position 1 (outer circle)

pos2

Thickness measurement at Position 2 (outer circle)

pos3

Thickness measurement at Position 3 (middle circle)

pos4

Thickness measurement at Position 4 (middle circle)

pos5

Thickness measurement at Position 5 (inner circle)

References

Roes, Kit CB, and Ronald JMM Does. "Shewhart-type charts in nonstandard situations." Technometrics 37.1 (1995): 15-24