WaferTypes {SASmixed} | R Documentation |
Data on different types of silicon wafers
Description
The WaferTypes
data frame has 144 rows and 8 columns.
Format
This data frame contains the following columns:
- Group
-
a factor with levels
1
to4
- Temperature
-
an ordered factor with levels
900
<1000
<1100
- Type
-
a factor with levels
A
andB
- Wafer
-
a numeric vector
- Site
-
a numeric vector
- delta
-
a numeric vector
- Thick
-
a numeric vector
- uWafer
-
an ordered factor giving a unique code to each group, temperature, type and wafer combination.
Source
Littel, R. C., Milliken, G. A., Stroup, W. W., and Wolfinger, R. D. (1996), SAS System for Mixed Models, SAS Institute (Data Set 5.8).
Examples
str(WaferTypes)
[Package SASmixed version 1.0-4 Index]